PDF(2736 KB)
Stress Release and Adhesion Stability of TiN Films Deposited by High Power Pulsed Magnetron Sputtering
TANG Xin, MA Dong-lin, CHEN Chang-zi, LENG Yong-xiang, HUANG Nan
Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 245-251.
PDF(2736 KB)
PDF(2736 KB)
Stress Release and Adhesion Stability of TiN Films Deposited by High Power Pulsed Magnetron Sputtering
high power pulsed magnetron sputtering; TiN films; stress release; adhesion; hardness; natural aging
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