PDF(3568 KB)
Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS
LI Lin-ru, WANG Zhen-yu, ZUO Xiao, LIU Lin-lin, HUANG Mei-dong, KE Pei-ling, WANG Ai-ying
Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 70-77.
PDF(3568 KB)
PDF(3568 KB)
Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS
HiPIMS; TiSiN coating; nanocomposite; low stress; high hardness
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