Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS

LI Lin-ru, WANG Zhen-yu, ZUO Xiao, LIU Lin-lin, HUANG Mei-dong, KE Pei-ling, WANG Ai-ying

Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 70-77.

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Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 70-77. DOI: 10.16490/j.cnki.issn.1001-3660.2019.09.006
Special Topic—High Power Impulse Magnetron Sputtering Technology and Engineering Application

Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS

  • LI Lin-ru1, WANG Zhen-yu2, ZUO Xiao2, LIU Lin-lin2, HUANG Mei-dong3, KE Pei-ling4, WANG Ai-ying4
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Abstract

The work aims to comparatively study the composition, microstructure and properties of TiSiN coatings prepared by the two different methods, high power impulse magnetron sputtering and direct current magnetron sputtering, so as to provide the theoretical basis and experimental guidance for the preparation of hard coatings by different magnetron sputtering techniques. The TiSiN coatings were prepared by HiPIMS and DCMS under the same power density. The structure and morphology of the coatings were characterized by X-ray diffractometry, X-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, surface profilometry, and scanning probe microscopy. The mechanical, tribological and corrosion resistance properties of the coatings were characterized by nanoindentor, scratch tester, UMT-3 reciprocating friction and wear tester and electrochemical workstation, respectively. Compared with the TisiN coatings prepared by DCMS, the TiSiN coatings prepared by HiPIMS technology demonstrated smoother surface and more compact structure. The hardness increased by 10% while the stress reduced by 35%, so the coatings exhibited higher hardness but lower stress. The toughness and coating-substrate adhesion also increased obviously. The coating-substrate adhesion was increased from 40 N to 50 N. The wear and corrosion resistance were also improved and the friction coefficient and corrosion current density were reduced by 10% and almost one order of magnitude, respectively. Therefore, compared with DCMS, HiPIMS technology presents significant advantages in the preparation of TiSiN nanocomposite coatings, and effectively improves the comprehensive performance of the coatings.

Key words

HiPIMS; TiSiN coating; nanocomposite; low stress; high hardness

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LI Lin-ru, WANG Zhen-yu, ZUO Xiao, LIU Lin-lin, HUANG Mei-dong, KE Pei-ling, WANG Ai-ying. Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS[J]. Surface Technology. 2019, 48(9): 70-77

Funding

National Natural Science Foundation of China (51875555, 11705258, 51801226); Ningbo Municipal Natural Science Foundation (2018A610175)
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