PDF(1554 KB)
Comparison of Chromium Nitride Thin Films Deposited by Reactive Direct Current Magnetron Sputtering and High Power Pulsed Magnetron Sputtering
LI Qian, LI Hua, WANG Zheng-duo, ZHANG Hai-bao, YANG Li-zhen, LIU Zhong-wei, CHEN Qiang
Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 64-69.
PDF(1554 KB)
PDF(1554 KB)
Comparison of Chromium Nitride Thin Films Deposited by Reactive Direct Current Magnetron Sputtering and High Power Pulsed Magnetron Sputtering
CrN films; DCMS; HiPIMS; microstructure; properties; wear resistance; corrosion resistance
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