PDF(2616 KB)
Research Progress on Preparation of Amorphous Carbon Thin Films by High Power Impulse Magnetron Sputtering
ZUO Xiao, SUN Li-li, WANG Ai-ying, KE Pei-ling
Surface Technology ›› 2019, Vol. 48 ›› Issue (9) : 53-63.
PDF(2616 KB)
PDF(2616 KB)
Research Progress on Preparation of Amorphous Carbon Thin Films by High Power Impulse Magnetron Sputtering
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