The work aims to further improve the quality of low temperature B-Cr-Re solid boronizing layer on carbon steel surface. The surface of carbon steel was treated by Fast Multiple Rotation Rolling (FMRR). Then, the low temperature B-Cr-Re solid permeation was studied. The structure, microhardness and boronizing layer of the substrate were characterized by trans-mission electron microscope, high resolution transmission electron microscope, scanning electron microscope and X-ray diffrac-tion. After FMRR treatment, severe plastic deformation occurred on the surface of the matrix and along the vertical surface of the matrix, the degree of deformation decreased gradually from the inside to the outside. The total deformation layer thickness was about 30 μm and the formation direction was streamline structure with uniform direction. Some of the grains were broken, the grains were gradually refined and the nanostructure layer was about 30 nm. Meanwhile, defects such as uncrystaline state, twin and high density dislocation were observed on the surface of the carbon steel. After FMRR treatment, the X-ray diffraction peak became wider, but no new phase was found. The microhardness of the surface of the matrix increases obviously and the surface of matrix is obviously strengthened. The FMRR improves the low temperature co-permeation speed of the substrate. The average thickness of the low-temperature boronizing layer is about 30 μm, which is 1.7 times that of the untreated low-temperature boronizing layer. The quality of the low-temperature boronizing layer is obviously improved.