The work aims to explore the possibility to process the inner surface of the quartz glass tube in two experimental stages of ultrasonic magnetic particle composite grinding and ultrasonic vibration compound polishing to obtain the optimum combination of process parameters. A cylindrical radial magnetizing auxiliary pole was added in the quartz glass tube and ultrasonic vibration was added to form a composite finishing device. An ultrasonic magnetic particle lapping device was formed by wrapping a layer of abrasive particles on the auxiliary magnetic pole surface, and an ultrasonic vibration polishing device was formed by wrapping a layer of polyurethane on the outer surface of the auxiliary magnetic pole. The response surface was optimized in the above mentioned ultrasonic magnetic particle complex grinding stage. Among the three variables of spindle speed, vibration frequency and particle diameter, one of the variables was kept unchanged, and the other two variables were combined to minimize the surface roughness. The best combination of process parameters was selected as the main parameter in the first stage. After 40 min grinding, the surface roughness decreased from 4.40 μm to 0.19 μm. On the basis of the first stage, the polishing of the second stage was carried out for 5 min, and the surface roughness decreased from 0.19 μm to 0.07 μm. Through response surface optimization, the best combination of ultrasonic particle and magnetic abrasive finishing is obtained: spindle speed of 1000 r/min, particle size of 250 μm, and vibration frequency of 20 kHz. After two stages of ultrasonic magnetic particle compound grinding and ultrasonic vibration compound polishing, the pits, protrusion and scratches in the inner surface of the glass tube are effectively removed, and the surface is more uniform and smooth.