PDF(1491 KB)
Influence of Nitrogen Flow on Structure and Performance of the Zr-B-N Films Prepared by Hybrid Magnetron Sputtering Techniques
WANG Tie-gang, GUO Yu-yao, TANG Kuan-yu, LIU Yan-mei, LIN Wei, JIANG Su-meng
Surface Technology ›› 2018, Vol. 47 ›› Issue (11) : 210-217.
PDF(1491 KB)
PDF(1491 KB)
Influence of Nitrogen Flow on Structure and Performance of the Zr-B-N Films Prepared by Hybrid Magnetron Sputtering Techniques
nanocomposite film; Zr-B-N film; microhardness; adhesion; friction coefficient
/
| 〈 |
|
〉 |