The work aims to prepare the micro arc oxidation coating on the beta titanium alloy with different solution heat treatment processes, and to study its growth characteristics at the early stage of micro arc oxidation process. The thickness, surface morphology, phase composition and electrochemical corrosion properties of coating on beta titanium alloy by solution heat treatment at the early stage (0~120 s) of micro arc oxidation process at as-cast condition, 750 ℃ and 850 ℃ were compared. The relationship between solution heat treatment and properties of coating was studied and the effect rules of heat treatment on crack generation and growth of coating were analyzed. The phase composition and element distribution of alloy were changed by solution heat treatment. The surface of specimen after heat treatment was easy to strike arc. Compared with the specimen without heat treatment, the oxidation time was 120 s. The thinner and denser coating was obtained after the heat treatment. The morphology of micro arc oxidation coating showed that the specimen after heat treatment at 750 ℃ had the fewest crack on the surface after the micro arc oxidation. From the polarization curve, the corrosion resistance of specimen after heat treatment at 750 ℃ was higher than that at 850 ℃. The alloy specimen after solid solution treatment at 750 ℃ has uniform arc discharge in the early stage of micro arc oxidation process due to even distribution of element and is easy to obtain the dense micro arc oxidation coating with better comprehensive properties.