Effects of Different Doping on Diamond-like Carbon Films

ZHANG Shu-jiao, WU Yan-xia, ZHU Li-nan, TANG Bin, LIU Ying

Surface Technology ›› 2018, Vol. 47 ›› Issue (9) : 193-198.

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PDF(812 KB)
Surface Technology ›› 2018, Vol. 47 ›› Issue (9) : 193-198. DOI: 10.16490/j.cnki.issn.1001-3660.2018.09.025
Coating Material and Technology

Effects of Different Doping on Diamond-like Carbon Films

  • ZHANG Shu-jiao, WU Yan-xia, ZHU Li-nan, TANG Bin, LIU Ying
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Abstract

The work aims to study the effects of Si-doping and (Si,Ag)-codoping on structure, tribological properties and corrosion resistance of diamond like carbon (DLC) films. With high purity graphite target, graphite & metallic composite target and Si target as targets, the films containing different doped elements were prepared by radio frequency (RF) enhanced magnetron sputtering technology. Chemical composition and structure of the films were analyzed by XPS and Raman spectrometer. Mechanical property, tribological properties and corrosion resistance of the films were systematically characterized by nano-indentation tester, ball-on-disc tribometer and electrochemical workstation, respectively. Doping of Si into DLC films could cause sp3 C content to increase. Codoping of Si and Ag into DLC films could cause sp3 C content to decrease as Ag was distributed in the film in the form of metallic phase and formation of the sp2 phase was promoted. The film hardness decreased with the doping of elements while its toughness was improved, and elastic recovery rate of the films co-doped with Ag and Si was 79%. In addition, the DLC films co-doped with Si and Ag exhibited excellent tribological properties, wear life of the films exceeded 30 min in different atmosphere (Ar,O2,N2), friction coefficient of the films was the lowest (<0.1) in N2, corrosion current density of the films decreased by nearly 2 orders of magnitude, and the films had good corrosion resistance in NaCl solution. Compared with Si-doped DLC films, the films co-doped with Si and Ag exhibit better friction environment self-adaption and corrosion resistance.

Key words

DLC films; doping; hardness; tribological properties; corrosion resistance; magnetron sputtering

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ZHANG Shu-jiao, WU Yan-xia, ZHU Li-nan, TANG Bin, LIU Ying. Effects of Different Doping on Diamond-like Carbon Films[J]. Surface Technology. 2018, 47(9): 193-198

Funding

Supported by the National Natural Science Foundation of China (51505318, 51671140), Shanxi Scholarship Council of China (2015-034)
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