The work aims to study effects of different heating temperature on mechanical properties of Ni-P/Ti/DLC multilayer films. Ni-P layer was prepared on die steel substrates by adopting electroless nickel-phosphate plating process, and Ti transition layer and DLC protective layer were deposited by adopting filtered cathodic vacuum arc (FCVA) technology. Composition of the multilayer films at different heating temperature was analyzed with Raman spectrometer, Hardness, elastic modulus, adhesion, and scratch morphology of the multilayer films were characterized with nano indentor, nano scratch tester and SEM. The results of Raman spectrometer showed that AD/AG value and sp2 content of DLC film on the multilayer films increased as heating temperature rose, and variation amplitude of AD/AG increased obviously at 400 ℃. The results of nano indention test showed that both hardness and elastic modulus of multilayer films first increased and then decreased as heating temperature rose, and reached the peak at 300 ℃. The films did not fracture during nanoindentation. The results of nano scratch test and SEM showed that critical load A1 of multilayer films increased as heating temperature rose; critical load A2 did not change obviously in the range of 25~200 ℃, but it increased significantly in the range of 300~400 ℃. Graphitization of DLC layer is remarkable at 400 ℃; mechanical properties and layer adhesion properties of multilayer films are better at 300 ℃; layer adhesion properties and crack growth inhibition weaken at 400 ℃, and layers exhibit greater plasticity, hence suitable heating temperature contributes to higher mechanical properties and layer adhesion properties of multilayer films.