As a key factor affecting the biological behavior of cells, physicochemical surface properties of biomedical titanium alloy determine the bone-implant bonding quality and the rates of integration. The work aims to review a series of advances of our group in the research of surface modification technology on titanium alloy. For preparation of surface morphology, the micro/nano- hierarchical structure was obtained on the surface of titanium alloy by both mechanical processing such as sandblasting, laser processing and micro-milling and chemical treatment including acid etching, alkali heat treatment and anodizing. For the surface chemical composition, bioactive ions were implanted on the micro/nano-structured surface by ion exchange; the quality of surface passivation film was improved using the oxygen-rich cutting method. The effects of surface modification methods on the biocompatibility of titanium implants were verified by electrochemical corrosion tests and a series of cell culturing experiments in vitro. According to the results, the micro/nano-structured surface can improve the wettability of the material and promote the cell adhesion, proliferation and mineralization. Besides, the implantation of bioactive ions further enhances the biocompatibility of implants because of the synergistic effect with the micro/nano-structure. In addition, the thickness of oxide film on titanium alloy surface increases significantly in the oxygen-rich processing atmosphere compared to the natural condition, which improves the biocompatibility of and corrosion resistance simultaneously.