C1 chemistry has important implications for relieving the energy crisis and environmental problems, and the research on related catalysts is a hotspot in this area. Plasma is proved to have advantages on the improvement of catalytic property and has been recognized by numerous researchers. The progress in plasma-enhanced preparation of catalyst used in C1 chemistry has been reviewed from three common cold plasmas, including: low-pressure glow discharge, dielectric barrier discharge and atmospheric pressure plasma jet. From the current study, the catalyst prepared via plasma has smaller particle size, higher dispersion, less lattice defects and stronger metal-support interaction, resulting in the better activity and anti-coking ability in CH4 combustion, CH4 reforming, CO2 hydrogenation reactions and so on. It is mainly ascribed to the property of “higher energy with lower temperature” of plasma: 1) the lower temperature of cold plasma can not only inhibit the sintering and agglomeration of metal particles, but also restrain the diffusion of metal particles into support and enhance the metal-support interaction; 2) the electrons in plasma can be absorbed on the surface of metal particles to make the metal particles negatively charged to repel each other so as to improve the dispersion; 3) the high-energy particles in plasma can decompose the precursor quickly, make metal particles rapidly nucleate with (111) face as a result of its low surface energy. The (111) face with fewer lattice defects can suppress the formation rate of coking.