the work aims to improve the surface hydrophilicity of graphite film by plasma treatment on graphite film. Using different process conditions on the graphite film surface treatment, test the contact angle of the graphite film; surface morphology of the sample before and after plasma treatment was observed by scanning electron microscopy and atomic force microscopy; by X-ray photoelectron spectroscopy analysis of the surface composition changes before and after; by universal material testing machine measured the peel strength of copper plating samples, and the adhesion between copper layer and graphite film was evaluated. When air was used as the treatment atmosphere, 30 s was treated under the condition of 60 W and 0.4 L/min power,the contact angle of graphite film reduced from 93.41° to 4.49° and the surface RMS roughness of graphite film surface amouted from 952.10 pm to 12.54 nm, Maximum height difference rises from 10.81 nm to 72.70 nm. XPS analysis shows that the content of carbon decreased from 98.37% to 83.13%, and the oxygen content increased from 1.63% to 16.87%, while the content of oxygen and carbon increased from 1.66% to 20.29%. After the graphite film was treated by plasma, the surface was etched and the polar group containing oxygen was introduced. The hydrophilicity of the graphite film was improved remarkably.