Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating

WANG Lu, JIN Yong-zhong, LIN Xiu-zhou, CHEN Chang-hao

Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 237-240.

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Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 237-240. DOI: 10.16490/j.cnki.issn.1001-3660.2017.11.032
Coating Material and Technology

Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating

  • WANG Lu, JIN Yong-zhong, LIN Xiu-zhou, CHEN Chang-hao
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Abstract

The work aims to study effects of duty cycle parameters on surface morphology and mechanical properties of TiAlSiN coating by depositing TiAlSiN coating on the surface of cemented carbide substrate by adopting multi-arc ion plating. Morphology of the coating was observed with scanning electron microscope, and mechanical properties of the coating were detected with automatic scratch tester and nano indentation tester. With the increase of duty cycle (10%~70%), the ion bombardment was strengthened, and the coating surface was greatly improved, large particles and tiny-pit defects decreased gradually. However, large particles and tiny-pit defects increased as the duty cycle increased to 90%. Nano-hardness, elastic modulus and adhesion of the coating first increase and then decrease as the duty cycle increases, and reach the maximum value of 48.15 GPa, 518.24 GPa, 50.55 N at 50%, respectively at the duty cycle of 50%.

Key words

multi-arc ion plating; TiAlSiN coating; duty cycle; surface morphology; mechanical properties

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WANG Lu, JIN Yong-zhong, LIN Xiu-zhou, CHEN Chang-hao. Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating[J]. Surface Technology. 2017, 46(11): 237-240

Funding

Supported by Foundation of Youth Science and Technology Innovation Team of Sichuan Province (2016TD0024) and Foster Research Project of Sichuan University of Science and Engineering (2014PY10)
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