PDF(1587 KB)
Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating
WANG Lu, JIN Yong-zhong, LIN Xiu-zhou, CHEN Chang-hao
Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 237-240.
PDF(1587 KB)
PDF(1587 KB)
Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating
multi-arc ion plating; TiAlSiN coating; duty cycle; surface morphology; mechanical properties
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