PDF(1721 KB)
Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films
SUN Shang-qi, LIU Xiang, WANG Yong-xin, LI Jing-long, WANG Li-ping
Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 104-109.
PDF(1721 KB)
PDF(1721 KB)
Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films
W-C:H film; sputtering target power; structure; friction coefficient; wear rate; toughness
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