Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films

SUN Shang-qi, LIU Xiang, WANG Yong-xin, LI Jing-long, WANG Li-ping

Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 104-109.

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Surface Technology ›› 2017, Vol. 46 ›› Issue (11) : 104-109. DOI: 10.16490/j.cnki.issn.1001-3660.2017.11.015
Special Topic—Marine Environment Surface Engineering

Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films

  • SUN Shang-qi1, LIU Xiang2, WANG Yong-xin3, LI Jing-long3, WANG Li-ping3
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Abstract

The work aims to research effects of different sputtering target power on structure and tribological properties of W-C:H films. With WC target as sputtering target and C2H2 as reaction gas, a series of W-C:H films were prepared on 316 stainless steel and Si(100) substrates by modulating sputtering target power. Microstructure and composition of the films were characterized with FESEM, XRD and Raman spectrum. Tribological properties of the films were analyzed with UMT-3MT multi-function friction machine. W-C was mainly distributed in amorphous carbon in the form of β-WC1?x nanocrystals, and it grew preferentially along (200) crystal face. W content in the film gradually increased as the sputtering power increased, diffraction peak of (200) face gradually increased, and sp2 content first decreased and then increased. The target power exhibited good tribological properties at 1.4 kW, friction coefficient was 0.15 and wear rate is 3.92×10?7 mm3/(N?m). As the sputtering target power gradually increases, the columnar crystals become thicker and the coating density decreases gradually. Tribological properties of the films are closely related to WC content.

Key words

W-C:H film; sputtering target power; structure; friction coefficient; wear rate; toughness

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SUN Shang-qi, LIU Xiang, WANG Yong-xin, LI Jing-long, WANG Li-ping. Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films[J]. Surface Technology. 2017, 46(11): 104-109

Funding

Supported by the Strategic Priority Research Program of the Chinese Academy of Sciences(XDA13040602),the National Natural Science Foundation of China (51475449),the National Basic Research Program of China (2014CB643302) and Industrial major science and technology projects of Ningbo City (201701ZD-A01099)
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