Extensive use of micro-parts requires higher precision and surface quality, and processing defects including poor surface roughness and micro burrs in micro-processing must be further removed to improve surface processing quality. Therefore, quality of micro-machined surface has aroused more attention of scholars both at home and abroad, and has become a focus and hotspot of domestic research. Research findings and research status concerning surface quality in micro-machining were reviewed, classified and summarized. Firstly, background and significance of micro-machining were introduced, characteristics of micro-cutting were reviewed and the surface quality was discussed in respect of surface roughness, surface residual stress, surface hardening and micro burrs. Then the processing technology was expounded in terms of fine turning, fine milling, fine milling and micro grinding. Test methods and scientific research results concerning surface quality in micro-cutting process were summarized. Relevant factors affecting surface quality, including cutting elements, tool elements and other cofactors, and law of processing affecting surface quality was concluded. Finally, quality of micro-machined surface was summed up, and some ways, methods and suggestions of improving quality of machined surface were proposed.