Effects of W and Mo Ion Implantations on Surface Structures and Properties of Ion-plated Titanium Nitride Coatings

TIAN Bin, LIU Bao-hui, YUE Wen, WANG Cheng-biao

Surface Technology ›› 2017, Vol. 46 ›› Issue (6) : 174-179.

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Surface Technology ›› 2017, Vol. 46 ›› Issue (6) : 174-179. DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.027
Special Topic—Hard Films and Coatings Technology

Effects of W and Mo Ion Implantations on Surface Structures and Properties of Ion-plated Titanium Nitride Coatings

  • TIAN Bin1, LIU Bao-hui1, YUE Wen2, WANG Cheng-biao2
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Abstract

The work aims to further improve tribological properties of TiN coatings. W and Mo ion implantations at same doses were performed on ion-plated TiN coatings using metal vapor vacuum arc (MEVVA) source. Ion implantation depth, morphology, surface roughness, phase structure, and nano-hardness at different implantation depth of TiN coatings were analyzed with scanning auger microprobe (SAM), three-dimensional optical profilometer, X-ray diffractometer (XRD) and nano indentor, respectively. Tribological peroperties of TiN coatings were investigated on a ball-on-disk sliding tribometer. Also, wear appearance was analyzed with scanning electron microscopy (SEM) and three-dimensional optical profilometer. Content of W ions in TiN coatings was obviously higher than that of Mo ions after the same dose implantations. W and Mo ion implantations had less effect on surface morphology and hardness of TiN coatings. The XRD results showed that Ti2N phases appeared on TiN coatings after W and Mo ion implantations. The friction coefficient and wear rate of TiN coatings decreased to different extent after W and Mo ion implantations. Tribological properties of the ion-plated TiN coatings cab be improved by both W and Mo implantations. However, the Mo ion implantation is more conducive to reduction of friction coefficient while the W ion implantation is more conducive to redcution of wear rate.

Key words

ion implantations; titanium nitride; friction; wear; tungsten ions; molybdenum ions

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TIAN Bin, LIU Bao-hui, YUE Wen, WANG Cheng-biao. Effects of W and Mo Ion Implantations on Surface Structures and Properties of Ion-plated Titanium Nitride Coatings[J]. Surface Technology. 2017, 46(6): 174-179

Funding

Supported by National Natural Science Foundation of China (41572362), Scientific Research Common Program of Beijing Municipal Education Commission (SQKM201710011002), Fundamental Research Funds for the Central Universities (2652015077), and Specialized Research Fund for the Doctoral Program of Higher Education (20130022110004)
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