PDF(1370 KB)
Colors and Properties Regulation of Ti-N Film Deposited by Unbalanced Magnetron Sputtering
YAN Sheng-shuo, LI An-suo, ZHU Chao-yue, YE Chong-hui, ZHANG Ling, BAO Xiao-xuan, BAO Ming-dong
Surface Technology ›› 2017, Vol. 46 ›› Issue (6) : 168-173.
PDF(1370 KB)
PDF(1370 KB)
Colors and Properties Regulation of Ti-N Film Deposited by Unbalanced Magnetron Sputtering
magnetron sputtering; Ti-N film; N2 flow rate; sputtering current; bias; film color
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