PDF(3022 KB)
Effect of N2 Flow Rate on TiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering
XIE Qi, FU Zhi-qiang, YUE Wen, WANG Cheng-biao
Surface Technology ›› 2017, Vol. 46 ›› Issue (6) : 161-167.
PDF(3022 KB)
PDF(3022 KB)
Effect of N2 Flow Rate on TiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering
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