Research progress of hard multiple-elements nitride films was reviewed. Production and characteristics of each generation of hard films were introduced in respect of development history of hard films. Structure and performance features of the hard multiple-elements nitride films were elaborated as well. Methods of improving hardness and toughness of the hard films were detailed. Several hardening mechanisms including grain refinement, grain boundary strengthening, solid solution strengthening and ion bombardment/stress hardening were discussed. In addition, methods of improving film toughness were introduced, i.e., introducing a ductile phase (including metallic phase), using phase transformation toughening, introducing compressive stress toughening and optimizing coating structure. It was pointed out that both hardness and toughness were very important indices for practical application of hard films. Pure pursuit of high hardness was inadvisable, because hard coatings usually were brittle and less durable while toughened films were less intensive. In view of practical engineering applications, it was more desirable to have films of high hardness without losing too much toughness. Finally, future development direction was going to focus on study on the nanometer scale of hardening and toughness, that was, how to further understand film deformation on the nanometer scale.