PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance

WU Yan, LI Yan-feng, ZHANG Er-geng, ZHAO Jie

Surface Technology ›› 2016, Vol. 45 ›› Issue (8) : 115-123.

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Surface Technology ›› 2016, Vol. 45 ›› Issue (8) : 115-123. DOI: 10.16490/j.cnki.issn.1001-3660.2016.08.020
Coating Material and Technology

PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance

  • WU Yan, LI Yan-feng, ZHANG Er-geng, ZHAO Jie
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Abstract

This work introduced the method to prepare DLC coating by physical vapor deposition (PVD) and then demonstrated the current research situation and development prospect of frictional wear and adhesion performance. It analyzed and summarized the technical development of DLC coating technology as well as DLC film preparation methods and factors influencing its functions. Workpiece with DLC films had relatively high hardness, good thermal conductivity, low coefficient of friction, excellent electrical insulation properties and so on. Diamond-like carbon (DLC) film is a metastable material combining the form of sp3 and sp2 bonds that has sprung up in recent years. DLC films have been widely applied in tribological field because of excellent friction-reduction and anti-wear properties. It is a new coating with properties similar to the diamond thin film. The study of DLC coating mainly focuses on its tribological property and binding force. As high-quality coating material, the DLC film has been widely applied in various fields such as automobile, mould, tools etc.

Key words

diamond-like carbon; friction coefficient; adhesion; physical vapor deposition

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WU Yan, LI Yan-feng, ZHANG Er-geng, ZHAO Jie. PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance[J]. Surface Technology. 2016, 45(8): 115-123

Funding

Supported by Shanghai Alliance Program (LM2014235, LM201374, LM201308);Shanghai City Board of Education Research and Innovation Project (12YZ160);Shanghai Institute of Technology Graduate Course Construction Funds (101YM130007);Program for Training Youth Teachers of Universities in Shanghai City(ZZyyy12003)
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