PDF(1900 KB)
Evolution of Discharge Characteristics of High Power Impulse Magnetron Sputtering Vanadium Target under Various Argon Pressures
LI Chun-wei, TIAN Xiu-bo, GONG Chun-zhi, XU Jian-ping
Surface Technology ›› 2016, Vol. 45 ›› Issue (8) : 103-109.
PDF(1900 KB)
PDF(1900 KB)
Evolution of Discharge Characteristics of High Power Impulse Magnetron Sputtering Vanadium Target under Various Argon Pressures
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