PDF(3739 KB)
Accurate Determination of Optical Constants of Ultrathin Tetrahedral Amorphous Carbon Films
XU Shi-peng, LI Yu-hong, CHEN Wei-qian, LIN Li, LI Jiang, XUE Yang-quan
Surface Technology ›› 2016, Vol. 45 ›› Issue (2) : 124-128.
PDF(3739 KB)
PDF(3739 KB)
Accurate Determination of Optical Constants of Ultrathin Tetrahedral Amorphous Carbon Films
ta-C; thin film;optical constants; spectroscopic ellipsometry; spectrophotometer; dispersion model
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