PDF(7541 KB)
Effect of Modulation Period on Toughness of CrAlN/ ZrN Nano-multilayer Films
ZHANG Wen-yong, SUN De-en, PEI Chen-rui, ZHANG Shi-hong, HUANG Jia-mu
Surface Technology ›› 2016, Vol. 45 ›› Issue (1) : 55-61.
PDF(7541 KB)
PDF(7541 KB)
Effect of Modulation Period on Toughness of CrAlN/ ZrN Nano-multilayer Films
CrAlN / ZrN nano-multilayers; magnetron sputtering; modulation period; hardness; toughness
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