Objective To study deformation behavior of supersonic multi-particles and analyze laws of the effect of deposition state of different particles and continuous particle compaction on coating formation. Methods The dominant non-linear finite element software LS-DYNA was used to simulate the impact of single particles and matrix, the automatic 2-D single surface contact was used to calculate the impact process so as to study the multi-particle deposition behavior and the influence pattern of continuous particle collision. In addition, the scanning electron microscopy (SEM) was used to analyze morphologies of the Al-Si coatings prepared by supersonic particles deposition (SPD) process on Al alloy to verify the reliability of the model. Results In the impinging process, multi-particles showed interlocking and extrusion effects between particles and this phenomenon was favorable for increase of adhesive strength. Also, the temping effect of continuous particles on pre-deposited particle increased the flattening of the particles and made the compression ratio increased by as far as 3 times, meanwhile, the temping effect avoided the porosity and flaws during the deposition process. The observation of the surface / section morphology of the prepared Al-Si coating proved the reliability of the model. Conclusion Numerical simulation methods can be used to investigate deformation behavior of supersonic particles, and provide a theoretical basis for the application of supersonic particle deposition.