Objective To obtain the flat end face of optical fiber array by designing proper polishing process plan. Methods The effects of polishing process parameters on the surface roughness of the optical fiber array and fiber projection were studied using single factor experiments, and the surface morphology was examined by Scanning Electronic Microscope and Optical Profilometer. Results Flat end face of optical fiber array was obtained under the conditions of particle concentration of 2% , polishing slurry flow rate of 15 mL/ min, polishing pressure of 50 kPa, and rotation speed of 30 r/ min. Conclusion Using chemical mechanical polishing to process optical fiber array, in combination with designing proper polishing process parameters, a perfect end-face of optical fiber array with surface roughness of 42. 6 nm and fiber projection of 0. 14 μm was achieved.