Objective To prepare a novel conductive probe to solve the existing problems such as the relatively large curvature radius of the tip of the conductive cantilever, high saturated magnetic force, low resolution and bad modulation. Methods A conductive film Si probe was obtained by evaporating of the Si probe tip with conductive metal thin film, the thickness of the Fe film was only a few nanometers, and meanwhile the curvature radius was ensured to be around 10 nm. The probe NaCl(001) surface before and after coating was observed and scanned by TEM and UHV-AFM, respectively, and the properties were analyzed. Results Because of the metal thin film evaporation, the home-built Fe thin film Si probe had a stable probe tip performance, and the hanging key effect of Si probe scanning was eliminated. At the same time, the scanning resolution of the system was elevated. Conclusion Conductive film Si probe made full use of existing equipments for experiments. It has advantages such as low cost, easy to use and stable performance. It can be used as an important tool for the magnetic exchange force measurements in spin research at atomic resolution in the future.