工艺参数对磁控溅射制备 TiO2 薄膜结晶性的影响
张盼盼, 丁龙先, 张帅拓
Effects of Process Parameters on Crystalline TiO2 Thin Films Prepared by Magnetron Sputtering
ZHANG Pan-pan, DING Long-xian, ZHANG Shuai-tuo
表面技术
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2015, (5): 48
-52,101
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DOI: 10.16490/j.cnki.issn.1001-3660.2015.05.009