SiC 单晶片化学机械研磨试验研究
王庆仓, 张晓东, 苏建修, 祝伟彪, 郗秦阳, 朱鑫, 裴圣华
Experimental Study on Chemical Mechanical Lapping of SiC Single Crystal Wafer
WANG Qing-cang, ZHANG Xiao-dong, SU Jian-xiu, ZHU Wei-biao, XI Qin-yang, ZHU Xin, PEI Sheng-hua
表面技术
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2015, (4): 137
-140,146
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DOI: 10.16490/j.cnki.issn.1001-3660.2015.04.025