氢/氩等离子体处理对金刚石-石墨复合薄膜表面调控及场发射性能的影响
石志成, 张文, 吴晋友, 王磊, 刘辉强, 汪建, 符亚军, 熊鹰, 王兵
Effect of H2/Ar Plasma Treatment on Surface Regulation and Field Emission Performance of Diamond-graphite Composite Films
SHI Zhicheng, ZHANG Wen, WU Jinyou, WANG Lei, LIU Huiqiang, WANG Jian, FU Yajun, XIONG Ying, WANG Bing
表面技术
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2026, (20): 285
-293
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.20.020
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