刻蚀机内腔体耐刻蚀涂层研究进展

刻蚀机内腔体耐刻蚀涂层研究进展

范雨鑫, 徐天培, 杨云乔, 朱琦

Research Progress of Etching-resistant Coatings for Inner Chambers of Etchers

FAN Yuxin, XU Tianpei, YANG Yunqiao, ZHU Qi

表面技术 . 2026, (20): 1 -16 . DOI: 10.16490/j.cnki.issn.1001-3660.2026.20.001