基于胺基功能化二氧化硅制备的抛光液性能研究
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Performance of Polishing Liquid Prepared Based on Amine-functionalized Silica
ZHAO Qinlong, JIAO Ziyan, WEI Wei, LI Xiaojie, LIU Jingcheng
表面技术
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2026, (19): 84
-95
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.19.008