基于胺基功能化二氧化硅制备的抛光液性能研究
赵秦陇, 焦子炎, 魏玮, 李小杰, 刘敬成
Performance of Polishing Liquid Prepared Based on Amine-functionalized Silica
ZHAO Qinlong, JIAO Ziyan, WEI Wei, LI Xiaojie, LIU Jingcheng
表面技术 . 2026, (19): 84 -95 .  DOI: 10.16490/j.cnki.issn.1001-3660.2026.19.008