钾离子与过氧化氢协同作用对钴化学机械抛光性能的影响
程力, 党社会, 吴庆果, 张登毅, 刘帅, 陈磊, 钱林茂
Synergistic Effects of Potassium Ions and H2O2 on Chemical Mechanical Polishing Performance of Cobalt
CHENG Li, DANG Shehui, WU Qingguo, ZHANG Dengyi, LIU Shuai, CHEN Lei, QIAN Linmao
表面技术
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2026, (19): 71
-83
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.19.007
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