Ti靶电流对AlCrTiN-DLC复合涂层性能的影响
贾永菲, 邓彩林, 张震, 徐经英, 郝静, 许宇轩, 刘艳梅, 王铁钢
Effect of Ti Target Current on the Properties of AlCrTiN-DLC Composite Coatings
JIA Yongfei, DENG Cailin, ZHANG Zhen, XU Jingying, HAO Jing, XU Yuxuan, LIU Yanmei, WANG Tiegang
表面技术
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2026, (13): 76
-88
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.13.007