沉积气压调控氰酸酯表面Cu膜性能研究

张悦, 唐德礼, 陈美艳, 刘旋, 钟利, 姚可, 金凡亚

Effects of Deposition Pressure on Cu Film Properties for Cyanate Ester Composites

ZHANG Yue, TANG Deli, CHEN Meiyan, LIU Xuan, ZHONG Li, YAO Ke, JIN Fanya

表面技术 . 2026, (12): 245 -255 . DOI: 10.16490/j.cnki.issn.1001-3660.2026.12.018