氧氩流量比对溅射氧化钒薄膜结构和光学性能的影响
杜姗, 黄美东, 刘春伟, 唐晓红, 吕长东
Influence of Gas Flow Ratio of Oxygen and Argon on Structure and Optical Properties of Sputtered Vanadium Dioxide Thin Films
DU Shan, HUANG Mei-dong, LIU Chun-wei, TANG Xiao-hong, LYU Chang-dong
表面技术 . 2013, (4): 24 -27 .