HiPIMS/DCMS复合磁控溅射(Al0.5CoCrFeNiTi)Nx薄膜结构及性能研究
王建刚, 许美琦, 刘瑞, 王玉江
Structure and Properties of (Al0.5CoCrFeNiTi)Nx Thin Films Deposited by Hybrid HiPIMS/DCMS Magnetron Sputtering
WANG Jiangang, XU Meiqi, LIU Rui, WANG Yujiang
表面技术
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2026, (8): 197
-207
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.08.016
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