氮气流量对TiSiN薄膜的结构及力学性能影响研究
魏晓莉, 何瑞芳, 高凯雄, 王新生, 叶国永, 庄新记
Effect of Nitrogen Flow Rate on Microstructure and Mechanical Properties of TiSiN Thin Films
WEI Xiaoli, He Ruifang, GAO Kaixiong, WANG Xinsheng, YE Guoyong, ZHUANG Xinji
表面技术
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2026, (7): 133
-142
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.07.011