中频磁控溅射电流对Si-DLC薄膜摩擦性能的影响
刘龙龙, 王少辉, 蒋成燕, 柴利强, 王鹏, 李勇, 胡勇
Effect of the Mid-frequency Magnetron Sputtering Current on the Tribological Properties of Si-DLC Films
LIU Longlong, WANG Shaohui, JIANG Chengyan, CHAI Liqiang, WANG Peng, LI Yong, HU Yong
表面技术
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2026, (5): 54
-67
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DOI: 10.16490/j.cnki.issn.1001-3660.2026.05.004