前驱体对PECVD制备类金刚石涂层的结构与性能的影响

黄志宏

Influence of Precursor on Structure and Properties of Diamond-like Carbon Coatings Prepared by PECVD

HUANG Zhihong

表面技术 . 2026, (1): 115 -121 . DOI: 10.16490/j.cnki.issn.1001-3660.2026.01.010