氮气流量比对三靶高功率脉冲磁控共溅射(TiSiAlCrV)N薄膜结构和性能的影响

张玉芬, 于涵, 马凯丽, 范海龙, 林铁贵, 强德宇

Effect of Nitrogen Flow Ratio on the Structure and Properties of (TiSiAlCrV)N Films via Three-target High-power Impulse Magnetron Co-sputtering

ZHANG Yufen, YU Han, MA Kaili, FAN Hailong, LIN Tiegui, QIANG Deyu

表面技术 . 2026, (1): 96 -106 . DOI: 10.16490/j.cnki.issn.1001-3660.2026.01.008