BK7光学玻璃化学机械抛光机理研究

BK7光学玻璃化学机械抛光机理研究

尹新城, 周宇航, 王有良, 王子恺

Chemical Mechanical Polishing Mechanism for BK7 Optical Glass

YIN Xincheng, ZHOU Yuhang, WANG Youliang, WANG Zikai

表面技术 . 2026, (1): 43 -57 . DOI: 10.16490/j.cnki.issn.1001-3660.2026.01.004