基体偏压对中频磁控溅射TiBx涂层结构及性能的影响
谷佳宾, 周永涛, 金杰, 李刘合, 王纪武, 王珊珊
Effect of Substrate Bias on Microstructure and Properties of TiBx Coatings Prepared by Mid-frequency Magnetron Sputtering
GU Jiabin, ZHOU Yongtao, JIN Jie, LI Liuhe, WANG Jiwu, WANG Shanshan
表面技术
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2025, (11): 100
-110
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DOI: 10.16490/j.cnki.issn.1001-3660.2025.11.008
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