HiPIMS制备Cr/CrxCy梯度过渡层对DLC薄膜结构及性能的影响
滑利强, 苏峰华, 李吉, 林松盛
Effect of Cr/CrxCy Gradient Transition Layer Prepared with HiPIMS on Properties of DLC Films
HUA Liqiang, SU Fenghua, LI Ji, LIN Songsheng
表面技术
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2025, (1): 62
-73
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DOI: 10.16490/j.cnki.issn.1001-3660.2025.01.006
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