双膜层ITO/SiO2薄膜制备及其膜电阻均匀性研究
朱治坤, 陈婉婷, 陈静, 朱常青, 刘荣梅
Preparation and Block Resistance Uniformity of ITO/SiO2 Films with Double Film Layer
ZHU Zhikun, CHEN Wanting, CHEN Jing, ZHU Changqing, LIU Yongmei
表面技术 . 2024, (24): 188 -196 .  DOI: 10.16490/j.cnki.issn.1001-3660.2024.24.017