激光-超声辅助磨削氮化铝表面改性机理

邓延生, 曹长虹, 陶彦辉, 孙聪, Wang Yanyan

Aluminum Nitride Surface Modification Mechanism by Laser Ultrasonic-assisted Grinding

DENG Yansheng, CAO Changhong, TAO Yanhui, SUN Cong, WANG Yanyan

表面技术 . 2024, (22): 141 -148, 160 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.22.012