沉积压力对石墨共溅射沉积(AlTiVCrNb)C<i>x</i>N<i>y</i>涂层结构及摩擦学性能的影响

张英豪, 侯雪滨, 蔡海潮, 薛玉君, 裴露露, 田昌龄

Effect of Deposition Pressure on Microstructure and Tribological Properties of (AlTiVCrNb)CxNy Coatings Deposited by Graphite Co-sputtering

ZHANG Yinghao, HOU Xuebin, CAI Haichao, XUE Yujun, PEI Lulu, TIAN Changling

表面技术 . 2024, (19): 61 -69, 140 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.19.006