无机薄膜组织结构及应力演化行为研究现状

刘怀远, 李佳临, 魏龙君, 马东林, 冷永祥

Research Progress on Microstructure and Stress Evolution Behavior of Inorganic Films

LIU Huaiyuan, LI Jialin, WEI Longjun, MA Donglin, LENG Yongxiang

表面技术 . 2024, (19): 1 -13 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.19.001