基于纳米划痕的熔石英玻璃去除机制与亚表面裂纹研究

郭佳乐, 伊浩, 朱力敏, 孙玉利, 左敦稳

Material Removal Mechanism and Sub-surface Cracking in Quartz Glass Based on Nano-scratch

GUO Jiale, YI Hao, ZHU Limin, SUN Yuli, ZUO Dunwen

表面技术 . 2024, (16): 151 -158 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.16.012