溅射技术与基体偏压对TiBx涂层结构和力学性能的影响
谷佳宾, 李建勇, 金杰, 李刘合
Effects of Sputtering Technology and Bias Voltage on Structure and Mechanical Properties of TiBx Coatings
GU Jiabin, LI Jianyong, JIN Jie, LI Lliuhe
表面技术
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2024, (15): 206
-215
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DOI: 10.16490/j.cnki.issn.1001-3660.2024.15.019
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